Development of on Chip Devices for Life Science Applications
نویسندگان
چکیده
This work reports on diverse technologies implemented for fabricating microfluidic devices such as biomedical micro sensors, micro pumps, bioreactors and micro separators. UV depth lithography and soft lithography were applied in the fabrication processes using different materials, for example SU-8, polydimethylsiloxane (PDMS), silicon, glass and ceramics. Descriptions of the fabrication process of completed devices and their performance are provided. Experimental tests and results are presented where available. This work highlights the importance of down scaling in producing efficient devices suitable for life science applications using diverse materials that are compatible with chemical and biomedical applications.
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